Anagrafe della ricerca

Lab4MEMS II - SP1-JTI-ENIAC-2013-2-8 - Equipment, materials and manufacturing SP1-JTI-ENIAC-2013-2-7 - Semiconductor process and integration

Durata:
43 mesi (2018)
Responsabile scientifico:
Tipo di progetto:
Ricerca UE - JTI ENIAC
Ente finanziatore:
COMMISSIONE EUROPEA (JU + MIUR)
Codice identificativo progetto:
JTI-ENIAC-2013-2

Abstract

Micro-Optical MEMS, micro-mirrors and pico-projectors. Lab4MEMS II will feature the Pilot Line for innovative technologies on advanced Micro-Opto-Electro-Mechanical Systems (MOEMS). This is not just a special class of MEMS systems in fact, but it deals with MEMS merged with Micro-optics, which involves sensing or manipulating optical signals on a very small size scale, using integrated mechanical, optical, and electrical systems. MOEMS includes a variety of devices including optical switch, array of micro-mirrors, optical crossconnect, lasers and micro lens amongst others. These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, molybdenum (Mo), silicon dioxide, silicon nitride (Si3N4), piezo coating, etc. The trend toward miniaturization and integration of conventional optical systems will accelerate the adoption of MOEMS technology in commercialization of many industrial components which are today’s most desirable elements of optical communication, i.e. MEMS-actuated micro optical mirrors, autofocus lens or 3D laser micro-scanners.

Strutture coinvolte

Partner

  • STMICROELECTRONICS S.R.L.

Budget

Costo totale progetto: € 23.743.966,73
Contributo totale progetto: € 3.561.595,01
Costo totale PoliTo: € 600.000,00
Contributo PoliTo: € 358.442,00